Spectral Confocal Displacement Sensors
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Ultra-high Repeatability
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Ultra-high Linearity
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Ultra-fast Sampling Rate
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Ultra-large Measurement Angle
Applications
Wafer Mapping Thickness Measurement
Measurement of the R-curves Angle of the Mobile Phone Screen
Oil Film Thickness and Liquid Level Height Measurement
PCB Component Height Difference Measurement
Measurement Principle
When white point light source passes through the dispersive confocal head and illuminates the target, different wavelength components of the light source form a longitudinal distribution; the light spot on the target returns through the coaxial optical path and then passes through a pinhole aperture, connecting to the spectrometer. When the distance to the target changes, the wavelength of the focused light also changes, resulting in different spectral distributions in the spectrometer.
ZTS#-CSC#Series Sensor Head
| Model | Reference Distance*1 | Measurement Range | Angle*2 | Spot Diameter*3 | Repeatability4 | Linear Error*5 | Outer Diameter*Length | Weight | Minimum Measurable Transparent Thickness | Temperature Characteristics |
IP Grade |
| ZTS0008-CSC | 8mm | ±0.05mm | ±46.5° | φ2.7μm | 3nm | <±0.03μm | φ40*111.5mm | 256g | |||
| ZTS001-CSC | 10mm | ±0.2mm | ±43° | φ7μm | 12nm | <±0.12μm | φ40*99.4mm | 186g | 5% of F.S. | <0.03% | |
| ZTS0007-CSC | 6.5mm | ±0.3mm | ±32.5° | φ8μm | 16nm | <±0.18μm | φ20*110 mm | 73g | F.S./℃ | ||
| ZTS002-CSC | 20mm | ±0.6mm | ±32° | φ9.5μm | 30nm | <±0.3μm | φ36*106.3mm | 182g | IP40 | ||
| ZTS005-CSC | 50mm | ±1mm | ±14° | φ20μm | 85nm | <±0.6μm | φ34*90.7mm | 162g | 10% of F.S. | <0.1% F.S./°C | |
| ZTS0009-CSC | 9mm | ±1.2mm | ±60° | φ5.5μm | 45nm | <±0.48μm | φ94*267.5mm | 2350g | 5% ofF.S. | <0.03% | |
| ZTS0015-CSC | 15mm | ±1.3mm | ±31° | φ9μm | 50nm | <±0.3μm | φ36*97.9mm | 228g | 5% ofF.S. | F.S./°C | |
| ZTS0007-CSC3 | 7mm | ±1.5mm | ±12.5° | φ20μm | 100nm | <±0.6μm | φ8*65.7mm | 23g*6 | 10% of F.S. | <0.05% F.S./°C |
IP67 |
| ZTS0015-CSC4 | 14.5mm | ±2mm | ±21° | φ12μm | 100nm | <±0.8μm | φ32*158.8mm | 238g | <0.03% | ||
| ZTS0038-CSC | 38mm | ±2mm | ±21° | φ16μm | 100nm | <±0.8μm | φ36*126.1mm | 226g | F.S./°C | ||
| ZTS004-CSC | 40mm | ±3mm | ±14° | φ22μm | 140nm | <±1.2μm | φ30*65.3mm | 112g | <0.05% F.S./°C |
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| ZTS0045-CSC | 45mm | ±3.5mm | ±15.5° | φ20μm | 140nm | <±1.4μm | φ36*84.2mm | 200g | |||
| ZTS0047-CSC | 47mm | ±3.5mm | ±21° | φ16μm | 140nm | <±1.4μm | φ52*207mm | 784g | 5% of F.S. | ||
| ZTS005-CSC10 | 50mm | ±5mm | ±13° | φ20μm | 250nm | <±2μm | φ36*84mm | 203g | |||
| ZTS0055-CSC | 55mm | ±8mm | ±15.3° | φ15μm | 300nm | <±2μm | φ60*211.1mm | 1180g | |||
| ZTS006-CSC | 60mm | ±10mm | ±10.5° | φ25μm | 290nm | <±2μm | φ36*163mm | 310g | IP40 | ||
| ZTS01-CSC | 100mm | ±25mm | ±9.5° | φ25μm | 850nm | <±5μm | φ60*217.3mm | 1154g | <0.03% F.S./°C |
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| ZTS0006-CSCR | Radial 5.75mm | ±0.75 mm | ±14° | φ20μm | 80 nm | <±0.3μm | φ8*70.2mm | 23g*6 | |||
| ZTS0003-CSCR | Radial 3mm | ±0.75 mm | ±12° | φ17μm | 100nm | <±0.75μm | φ3.8*85mm | 23g*6 | |||
| ZTS0005-CSC4 | Axial: 4.7mm | ±2 mm | ±12.5° | φ20μm | 100nm | <±1.2μm F.S. |
φ8*73.1mm | 59g*6 | 10% of F.S. | ||
| ZTS0008-CSCR | Radial: 8mm |
*1 Calculated from the center position of the measurement range;
*2 Tilt test using standard flat mirror at 1kHz Sampling Rate;
*3 Measurement of sharp glass edges, verified with a sub-micron positioning accuracy motion platform and laser interferometer as the displacement reference;
*4 Measurement of standard silver-coated mirror; 1kHz without averaging, root mean square deviation of 10,000 continuous data sets;
*5 Calibration verification using high-precision nanoscale laser interferometer;
*6 This head model includes a 3m tail cable, and the weight in the table includes the weight of the cable;
ZTS#-CSC#Series Controller
| Model | ZTS-CSC-CS | ZTS-CSC-CD | ZTS-CSC-CF | zts-csc-ch | |
| Sensor Head Connection Capacity | 1 | 2 | 4 | 16 | |
| Sampling Rate | 1 channel: Max.10 kHz; 2 channels: Max.5 kHz; 4 channels: Max.2.5 kHz | Supports up to 16 sensor heads connected simultaneously. | |||
| Input Port | Encoder Input | AB / ABZ encoder input, configurable for trigger | |||
| Trigger Signal Input | Pulse / Level trigger | ||||
| Output Port | Digital Signal Output | Alarm output, comparator output (Configurable as comparator output or data invalid warning) | |||
| Analog Signal Output | Linear ±10 V analog voltage output / 4~20 mA analog current output (Optional) | ||||
| Industrial Interface | Ethernet | 100BASE-Tx | |||
| USB | Complies with USB2.0 Full-speed standard | ||||
| RS-485 | Modbus protocol, 19200~115200 baud rate | ||||
| Measurement & Control Software | Host Computer Software | Confocal Studio measurement & control software | |||
| SDK | C++&C#SDK | ||||
| Rated Power | Supply Voltage | 24VDC±10% | |||
| Current Consumption | 0.4 A | ||||
| Environmental Tolerance | Operating Temperature | 0 to +50℃ | |||
| Relative Humidity | 20 to 85% RH(No condensation) | ||||
| Weight | 2000 g | ||||