White Light InterferenceFilm Thickness Sensors
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Ultra-high Repeatability
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Ultra-high Linearity
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Ultra-fast Sampling Rate
Applications
Thickness Measurement of Multilayer PET Films
Thickness Measurement of Ultra-thin Flexible Glass (UTG)
Thickness Measurement of Lithium-ion Battery Separator
Thickness Measurement of ITO Film for Touch Screens
Measurement Principle
The white point light spectrum passes through the interferometric probe and illuminates the surface of the sample. The reflected light from the upper and lower surfaces of the sample is simultaneously received by the interferometric probe. The phase difference between the two reflected beams is related to the film thickness, thus allowing the calculation of the film thickness value by analyzing the interference fringes.
ZTS#-CSIT# Series Sensor Head
| Model | Recommended Working Distance*1 | Measurement Angle*2 | Spot Type*3 | Repeatability*4 | Linear Error*5 | Outer Diameter*Length | Weight | IP Grade |
| ZTS005-CSIT | 50mm±2mm | ±3° | Focus spot, φ100μm | 1nm | <±20nm | φ30*58mm | 90g | IP40 |
| ZTS001-CSITW | Installation distance 5-10mm | ±10° | Dispersive spot, φ4mm(Installation distance=10mm) | 1nm | <±20nm | φ6.35*3200mm*6 | 190g | IP40 |
*1 Focusing position, where the sensor has the strongest return light signal;
*2 Using a standard plane mirror for tilt testing at a sampling rate of 1kHz;
*3 Measuring sharp glass edges, using a motion platform with sub-micron positioning accuracy and a laser interferometer as the displacement reference for verification;
*4 Measuring standard thickness samples, the root mean square deviation of 10,000 sets of thickness data collected continuously at 1kHz without averaging;
*5 Theoretical value;
*6 The length of 3200mm refers to the total length of the probe including the cable.
ZTS#-CSIT# Series Controller
| Model | ZTS-CSIT-S100 (Adapt Head Model: ZTS005-CSIT) | ZTS-CSIT-S100W (Adapt Head Model: ZTS001-CSITW) | |
| Sensor Head Connection Capacity | 1 | ||
| Sampling Rate | Max.10kHz | ||
| Range of Thickness Measurement | Approx.1μm~100μm(Refractive index=1.5) | ||
| Input Port | Encoder Input | AB / ABZ encoder input, configurable for trigger | |
| Trigger Signal Input | Pulse / Level trigger | ||
| Output Port | Digital Signal Output | Alarm output, comparator output | |
| Analog Signal Output | Linear 0~5V/0~10V/±5V/±10V analog voltage output; 4~20mA analog current output | ||
| Industrial Interface | Ethernet | 100BASE - TX | |
| USB | Complies with USB2.0 Full-speed standard | ||
| RS-485 | Modbus protocol, 19200~115200 baud rate | ||
| Measurement & Control Software | Host Computer Software | ConfocalStudio measurement & control software | |
| SDK | C++&C#SDK | ||
| Rated Power | Supply Voltage | 24 VDC±10% | |
| Current Consumption | 0.4A | ||
| Environmental Tolerance | Operating Temperature | 0 to +50℃ | |
| Relative Humidity | 20 to 85% RH(No condensation) | ||
| Weight | 2000g | ||